Semiconductor

Semiconductor media purity requirements reach ppb level, so "introduce no contamination" leads instrument selection. At 18.2 MΩ·cm, ultrapure water requires ultrasonic or Coriolis meters with high-purity PFA/PTFE wetted parts.

Specialty gas measurement must be intrinsically safe or flameproof with internal roughness Ra ≤ 0.25 μm. Electromagnetic meters for wet chemicals need attention to the lower temperature limits of PVDF/PFA lining.